Vacuum-compatible motors, gearboxes and motion modules for equipment operating under reduced-pressure and controlled-environment conditions. Compare available product families, review real specifications and select the configuration that fits your system.
Open a family to review the products and technical information currently available for that category.
SPHVC135C vacuum high & low temperature linear stage with a 135 mm frame, ±0.01–0.02 mm repeatability, 400 W servo drive, Ø20 mm…
SPHVC120C vacuum high & low temperature linear stage with a 120 mm frame, ±0.01–0.02 mm repeatability, 400 W servo drive, Ø16 mm…
SPHVC65C vacuum high & low temperature linear stage with a 65 mm frame, ±0.01–0.02 mm repeatability, 100 W servo drive, Ø12 mm…
SPVS5500W vacuum servo motor with 26.26 N·m rated torque, 78.78 N·m maximum torque, 2000 rpm rated speed, a 220 V winding and…
SPVS3800W vacuum servo motor with 15 N·m rated torque, 45 N·m maximum torque, 2500 rpm rated speed, 110 / 220 / 380…
SPVS2600W vacuum servo motor with 9.93 N·m rated torque, 29.8 N·m maximum torque, 2500 rpm rated speed, 220 / 380 V winding…
SPVS1800W vacuum servo motor with 6.88 N·m rated torque, 20.63 N·m maximum torque, 2500 rpm rated speed, 110 / 220 / 380…
SPVS750W vacuum servo motor with 2.39 N·m rated torque, 7.17 N·m maximum torque, 3000 rpm rated speed, 48 / 110 / 220…
Start with the operating environment and motion requirement, then confirm mechanical fit and electrical integration against the product-level technical data.
Define vacuum level, temperature range, cleanliness and other environmental constraints.
Confirm load, speed, torque, travel, positioning accuracy and duty cycle.
Match frame size, mounting interface, shaft or screw configuration and available installation space.
Review supply, current, feedback, drive method and communication requirements before selection.
Share your required motor type, operating environment, quantity and technical requirements. Our engineering team will review the details and contact you.
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