2600 W Vacuum Servo Motor

Vacuum Servo Motor
SPVS2600W vacuum servo motor with 9.93 N·m rated torque, 29.8 N·m maximum torque, 2500 rpm rated speed, 220 / 380 V winding options and resolver configurations rated to 1 × 10⁻⁷ Pa.
2600 W vacuum servo motor with transparent background

Positioning accuracy

High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance

Compactness

High torque density thanks to high performance and short design

Low maintenance

Highest quality standards for a long service life and extended maintenance intervals

Technical data

2600 W vacuum servo platform

High-torque closed-loop motion for demanding vacuum systems

SPVS2600W delivers 9.93 N·m rated torque and 29.8 N·m maximum torque at speeds up to 3000 rpm, with winding and feedback configurations for precision motion inside controlled vacuum environments.

2600 W servo performance

Combines 2500 rpm rated speed with a 3000 rpm maximum speed for dynamic precision axes.

Vacuum-ready construction

Resolver configurations are rated to 1 × 10−7 Pa for high-vacuum equipment.

Selectable feedback

Choose resolver feedback or a multi-turn absolute encoder to match positioning and environmental requirements.

Flexible winding options

Available winding configurations cover 220 V and 380 V machine architectures.

Wide temperature capability

Resolver versions support environments from −196°C to +200°C, subject to final configuration review.

Brake-ready platform

Mechanical data is provided for versions with and without a holding brake.

Engineering information

Technical data

Electrical, environmental, mechanical and connection data for the SPVS2600W are listed below.

2600 WRated power
SPVS2600WProduct model
9.93 N·mRated torque
130 mmFrame size

Electrical data

Voltage-specific performance

Electrical values are listed for the supplied 5-pole-pair winding configurations.

SPVS2600W electrical specifications by voltage configuration
Pole pairs Voltage Rated current Maximum current Line resistance Line inductance Back EMF
5 220 V 10 A 30 A 0.434 Ω 2.83 mH 67.67 V/Krpm
5 380 V 5.8 A 17.4 A 1.45 Ω 7.83 mH 115.26 V/Krpm
Motor data

Core operating values

Values are common to the supplied 220 V and 380 V winding options unless noted.

SPVS2600W core motor specifications
Specification Value Notes
Pole pairs 5 All supplied configurations
Rated power 2600 W All supplied configurations
Rated torque 9.93 N·m All supplied configurations
Rated speed 2500 rpm All supplied configurations
Maximum torque 29.8 N·m Peak operating point
Maximum speed 3000 rpm Speed ceiling
Rotor inertia without brake 18.927 kg·cm² —
Rotor inertia with brake 19.757 kg·cm² —
Feedback Resolver, Hall, incremental, multi-turn absolute encoder Configuration dependent
Insulation class F —
Protection class IP54 (excluding shaft end) —
Weight without brake 9 kg —
Weight with brake 10.2 kg —
Environmental data

Vacuum and temperature limits

Feedback selection determines the allowable vacuum and temperature range.

SPVS2600W environmental limits by feedback configuration
Feedback configuration Vacuum level Operating temperature
Resolver 1 × 10−7 Pa −196°C to +200°C
Other encoder configurations Limit: 1 × 10−4 Pa −40°C to +105°C
Mechanical interface

Dimensions and connection data

Use the drawing and connection data below to review the 130 mm frame interface. Confirm the final brake, cable exit and feedback configuration before release.

2600 W vacuum servo motor mechanical dimensions and mounting interface
SPVS2600W mechanical dimensions in millimetres. Confirm the final brake, cable exit and feedback configuration before release.
Dimensional reference

130 mm frame interface

Key dimensions from the supplied 2600 W drawing
Feature Dimension
Frame 130 mm square
Motor body height 145 mm
Pilot diameter Ø110 mm (0 / −0.035)
Shaft diameter Ø22 mm (0 / −0.015)
Shaft extension 57 ± 1 mm
Usable shaft length 40 mm
Shaft-tip reference 2.5 mm
Front flange thickness 14.2 mm
Body length 188 ± 1.5 mm
Overall length with brake 208 ± 1.5 mm
Front pilot / step 5 mm
Mounting holes 4 × Ø9 through on PCD Ø145
Threaded feature M6, depth 12 mm
Key width 6 mm
Key length 25 mm
Connection data

Power connector

Power and brake connector pinout
Pin Signal Color
1 U Red
2 V White
3 W Black
4 PE Green
5 B+ Yellow
6 B− Brown
Connection data

Resolver

Resolver connector pinout
Pin Signal Color
1 Cos+ Red
2 Cos− Black
3 Ref+ Green
4 Ref− White
5 Sin+ Yellow
6 Sin− Blue
7 PE Shield
Connection data

Absolute encoder

Multi-turn absolute encoder connector pinout
Pin Signal Color
1 485+ Blue
2 485− Yellow
3 VCC+ Red
4 GND− Black
5 Battery+ Green
6 Battery− White
7 PE Shield
Performance data

Torque-speed information

SPVS2600W supplied operating-envelope points
Operating point Value
Rated torque 9.93 N·m
Maximum torque 29.8 N·m
Rated speed 2500 rpm
Maximum speed 3000 rpm
Detailed torque-speed curve Confirm the final curve for the selected 220 V or 380 V winding and feedback configuration.

Vacuum servo integration

Select the winding and feedback for the real chamber conditions

Final selection should consider chamber pressure, supply voltage, pole pairs, torque-speed duty cycle, feedback, brake, temperature, cabling and feedthrough requirements.

  • Confirm resolver or absolute-encoder environmental limits
  • Select 220 V or 380 V winding options
  • Use the supplied 5-pole-pair control architecture
  • Validate brake, cable and connector requirements
2600 W vacuum servo motor with transparent background

Application fields

High-output servo motion for controlled environments

The 2600 W platform supports higher-load precision axes where conventional servo motors cannot meet vacuum and temperature requirements.

Semiconductor equipment

Closed-loop positioning for wafer handling, transfer and process-support mechanisms.

Vacuum coating

Controlled motion for deposition, handling and chamber automation systems.

Scientific instruments

Precision servo axes for analytical equipment and large vacuum chambers.

Special-environment systems

Application-specific configurations for cryogenic and elevated-temperature operation.

System integration

Verified data for faster machine design

Use the voltage table, feedback-specific environmental limits, clear mechanical drawing and HTML connection definitions to review the complete drive and vacuum system.

Product modelSPVS2600W
Rated power2600 W
Rated torque9.93 N·m
Maximum torque29.8 N·m
Rated / maximum speed2500 / 3000 rpm
FeedbackResolver, Hall, incremental, multi-turn absolute encoder

Discuss your 2600 W vacuum servo axis with our engineers.

Share the chamber pressure, temperature, load, speed, duty cycle, voltage, pole pairs, feedback and brake requirements for configuration review.

Request consultation  →

Contact us

Would you like to learn more about our solutions?
We would be happy to advise you—personally, competently, and tailored to your requirements.

Perfection in a new dimension

2600 W Vacuum Servo Motor
SPVS2600W vacuum servo motor with 9.93 N·m rated torque, 29.8 N·m maximum torque, 2500 rpm rated speed, 220 / 380 V winding options and resolver configurations rated to 1 × 10⁻⁷ Pa.

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