3800 W servo performance
Combines 2500 rpm rated speed with a 3000 rpm maximum speed for dynamic precision axes.
High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance
High torque density thanks to high performance and short design
Highest quality standards for a long service life and extended maintenance intervals
SPVS3800W delivers 15 N·m rated torque and 45 N·m maximum torque at speeds up to 3000 rpm, with winding and feedback configurations for precision motion inside controlled vacuum environments.
Combines 2500 rpm rated speed with a 3000 rpm maximum speed for dynamic precision axes.
Resolver configurations are rated to 1 × 10−7 Pa for high-vacuum equipment.
Choose resolver, Hall, incremental or multi-turn absolute encoder feedback to match positioning and environmental requirements.
Available winding configurations cover 110 V, 220 V and 380 V machine architectures.
Resolver versions support environments from −196°C to +200°C, subject to final configuration review.
Mechanical data is provided for versions with and without a holding brake.
Electrical, environmental, mechanical and connection data for the SPVS3800W are listed below.
Electrical data
Electrical values are listed for the supplied 5-pole-pair winding configurations.
| Pole pairs | Voltage | Rated current | Maximum current | Line resistance | Line inductance | Back EMF |
|---|---|---|---|---|---|---|
| 5 | 110 V | 27 A | 81 A | 0.071 Ω | 0.459 mH | 35.89 V/krpm |
| 5 | 220 V | 13.5 A | 40.5 A | 0.277 Ω | 2 mH | 74.92 V/krpm |
| 5 | 380 V | 7.5 A | 22.5 A | 0.85 Ω | 5.6 mH | 132 V/krpm |
Motor data
Values are common to the supplied 110 V, 220 V and 380 V winding options unless noted.
| Specification | Value | Notes |
|---|---|---|
| Pole pairs | 5 | All supplied configurations |
| Rated power | 3800 W | All supplied configurations |
| Rated torque | 15 N·m | All supplied configurations |
| Rated speed | 2500 rpm | All supplied configurations |
| Maximum torque | 45 N·m | Peak operating point |
| Maximum speed | 3000 rpm | Speed ceiling |
| Rotor inertia | 31.048 / 31.878 kg·cm² | Without brake / with brake |
| Weight | 13.2 / 14.3 kg | Without brake / with brake |
| Feedback | Resolver, Hall, incremental, or multi-turn absolute encoder | Configuration dependent |
| Insulation class | F | — |
| Protection class | IP54 | Excluding shaft end |
Environmental data
Feedback selection determines the allowable vacuum and temperature range.
| Feedback configuration | Vacuum level | Operating temperature |
|---|---|---|
| Resolver | 1 × 10−7 Pa | −196°C to +200°C |
| Other encoder feedback | Limit: 1 × 10−4 Pa | −40°C to +105°C |
Use the drawing and connection data below to review the 130 mm frame interface. Confirm the final brake, cable exit and feedback configuration before release.

Dimensional reference
| Feature | Dimension |
|---|---|
| Frame | 130 mm square |
| Motor body height | 145 mm |
| Pilot diameter | Ø110 mm (0 / −0.035) |
| Shaft diameter | Ø22 mm (0 / −0.015) |
| Shaft extension | 57 ± 1 mm |
| Usable shaft length | 40 mm |
| Shaft-tip reference | 2.5 mm |
| Front flange thickness | 14.2 mm |
| Body length | 238 ± 1.5 mm |
| Overall length with brake | 258 ± 1.5 mm |
| Front pilot / step | 5 mm |
| Mounting holes | 4 × Ø9 through on PCD Ø145 |
| Threaded feature | M6, depth 12 mm |
| Key width | 6 mm |
| Key length | 25 mm |
Connection data
| Pin | Signal | Color |
|---|---|---|
| 1 | U | Red |
| 2 | V | White |
| 3 | W | Black |
| 4 | PE | Green |
| 5 | B+ | Yellow |
| 6 | B− | Brown |
Connection data
| Pin | Signal | Color |
|---|---|---|
| 1 | Cos+ | Red |
| 2 | Cos− | Black |
| 3 | Ref+ | Green |
| 4 | Ref− | White |
| 5 | Sin+ | Yellow |
| 6 | Sin− | Blue |
| 7 | PE | Shield |
Connection data
| Pin | Signal | Color |
|---|---|---|
| 1 | 485+ | Blue |
| 2 | 485− | Yellow |
| 3 | VCC+ | Red |
| 4 | GND− | Black |
| 5 | Battery+ | Green |
| 6 | Battery− | White |
| 7 | PE | Shield |
Performance data
| Operating point | Value |
|---|---|
| Rated torque | 15 N·m |
| Maximum torque | 45 N·m |
| Rated speed | 2500 rpm |
| Maximum speed | 3000 rpm |
| Torque-speed curve | Configuration-specific; select the 110 V, 220 V or 380 V winding before final curve confirmation. |
Final selection should consider chamber pressure, supply voltage, pole pairs, torque-speed duty cycle, feedback, brake, temperature, cabling and feedthrough requirements.

The 3800 W platform supports higher-load precision axes where conventional servo motors cannot meet vacuum and temperature requirements.
Closed-loop positioning for wafer handling, transfer and process-support mechanisms.
Controlled motion for deposition, handling and chamber automation systems.
Precision servo axes for analytical equipment and large vacuum chambers.
Application-specific configurations for cryogenic and elevated-temperature operation.
Use the voltage table, feedback-specific environmental limits, clear mechanical drawing and connection definitions to review the complete drive and vacuum system.
Share the chamber pressure, temperature, load, speed, duty cycle, voltage, pole pairs, feedback and brake requirements for configuration review.
Compare additional vacuum servo motor options for your machine design.
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We would be happy to advise you—personally, competently, and tailored to your requirements.
Short delivery times available for selected product configurations.
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