Explore available Vacuum Module products, compare verified specifications and open each product page for complete technical data, drawings and integration information.
Vacuum-compatible five-axis positioning stage with X/Y/Z linear motion, continuous R-axis rotation, T-axis tilt, multiple feedback options and operation below 5.0 × 10⁻⁷…
Vacuum-compatible rotary positioning stage series with Ø100–Ø400 mm tables, 360° travel, 0.005° repeatability, load capacity up to 120 kg, and application-specific 1…
SPHVC135C vacuum high & low temperature linear stage with a 135 mm frame, ±0.01–0.02 mm repeatability, 400 W servo drive, Ø20 mm…
SPHVC120C vacuum high & low temperature linear stage with a 120 mm frame, ±0.01–0.02 mm repeatability, 400 W servo drive, Ø16 mm…
SPHVC65C vacuum high & low temperature linear stage with a 65 mm frame, ±0.01–0.02 mm repeatability, 100 W servo drive, Ø12 mm…
Start with the operating environment and motion requirement, then confirm mechanical fit and electrical integration against the product-level technical data.
Define vacuum level, temperature range, cleanliness and other environmental constraints.
Confirm load, speed, torque, travel, positioning accuracy and duty cycle.
Match frame size, mounting interface, shaft or screw configuration and available installation space.
Review supply, current, feedback, drive method and communication requirements before selection.
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