Vacuum-oriented construction
Configuration options are available for chamber pressures down to 1 × 10−7 Pa, subject to final system validation.
SPHVC65C Vacuum High & Low Temperature Linear Stage
Vacuum Module
SPHVC65C vacuum high & low temperature linear stage with a 65 mm frame, ±0.01–0.02 mm repeatability, 100 W servo drive, Ø12 mm ball screw, vacuum options down to 1 × 10⁻⁷ Pa and −196 to +200 °C temperature capability. Final configuration review is required.
Positioning accuracy
High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance
Compactness
High torque density thanks to high performance and short design
Low maintenance
Highest quality standards for a long service life and extended maintenance intervals
Technical data
Vacuum high & low temperature linear stage
Precision linear motion for extreme vacuum and temperature environments
SPHVC65C combines a rigid linear-stage structure, ball-screw drive and servo motor for positioning tasks in vacuum, cryogenic and elevated-temperature equipment. Final capability depends on the selected materials, lubricant, cable, feedthrough and validation conditions.
Extreme-temperature options
Application-specific materials and lubrication can support environments from −196 to +200 °C.
Repeatable positioning
Specified repeatability is ±0.01–0.02 mm for properly selected and installed configurations.
Lead-based performance
Choose the screw lead against travel speed, horizontal load and vertical load requirements.
Scalable travel
100–600 mm standard, 50 mm increments. Mechanical configurations for 650–800 mm are listed in the supplied drawing; confirm availability and effective travel during selection.
Engineering configuration
Motor, sensor, cable, connector, brake and mounting details can be reviewed for the target chamber.
Engineering information
Technical data
Technical values are presented as searchable HTML tables. Each table has its own horizontal scroll area on mobile devices.
65 mmFrame size
±0.01–0.02 mmRepeatability
1 × 10−7 PaVacuum level
−196 to +200 °CTemperature range
Motion data
Lead, speed and payload options
Load values are supplied reference ratings; verify orientation, duty cycle, acceleration, overhang and life requirements.
| Ball-screw lead | Maximum speed | Horizontal load | Vertical load |
|---|---|---|---|
| 5 mm | 250 mm/s | 28 kg | 12 kg |
| 10 mm | 500 mm/s | 16 kg | 6 kg |
Drive data
Core configuration
| Motor power | 100 W |
| Ball-screw diameter | Ø12 mm |
| Repeatability | ±0.01–0.02 mm |
| Stroke | 100–600 mm standard, 50 mm increments |
Environmental data
Configuration limits
| Vacuum level | Down to 1 × 10−7 Pa |
| Temperature range | −196 to +200 °C |
| Radiation tolerance | Up to 1 × 106 Gy |
| Selection note | Materials, lubricant, cable and verification conditions must be confirmed. |
Mechanical interface
Dimensions and stroke configurations
The clean mechanical drawing is separated from the searchable dimensional table. Values are in millimetres unless otherwise stated.
Dimensional reference
Stroke-dependent dimensions
Mechanical configurations for 650–800 mm are listed in the supplied drawing; confirm availability and effective travel during selection.
| S (mm) | L (mm) | A (mm) | N | P | Weight (kg) |
|---|---|---|---|---|---|
| 100 | 305 | 208 | 10 | 4 | 2.6 |
| 150 | 355 | 330 | 12 | 5 | 2.9 |
| 200 | 405 | 380 | 16 | 7 | 3.2 |
| 250 | 455 | 430 | 18 | 8 | 3.5 |
| 300 | 505 | 480 | 20 | 9 | 3.8 |
| 350 | 555 | 530 | 22 | 10 | 4.1 |
| 400 | 605 | 580 | 26 | 12 | 4.4 |
| 450 | 655 | 630 | 28 | 13 | 4.7 |
| 500 | 705 | 680 | 30 | 14 | 5 |
| 550 | 755 | 730 | 32 | 15 | 5.3 |
| 600 | 855 | 780 | 36 | 17 | 5.6 |
| 650 | 855 | 830 | 38 | 18 | 5.9 |
| 700 | 905 | 880 | 40 | 19 | 6.2 |
| 750 | 955 | 930 | 42 | 20 | 6.5 |
| 800 | 1005 | 980 | 47 | 22 | 6.8 |
Vacuum-stage integration
Configure the stage around the real chamber conditions
Selection should consider chamber pressure, temperature, radiation exposure, stroke, load direction, speed, acceleration, duty cycle, mounting, sensor, motor cable and feedthrough requirements.
- Confirm horizontal and vertical payload separately
- Select the screw lead for the required speed and thrust
- Validate lubricant and material compatibility
- Review cable routing, sensor and chamber feedthroughs
Application fields
Linear positioning for controlled environments
SPHVC65C is intended for engineered motion axes where standard industrial stages cannot meet vacuum or temperature constraints.
Semiconductor equipment
Transfer, positioning and process-support axes for vacuum-compatible production tools.
Vacuum coating
Controlled positioning for deposition, handling and chamber automation systems.
Scientific instruments
Precision translation for analysis, test and research equipment.
Aerospace simulation
Application-specific stages for thermal-vacuum and radiation-related test systems.
System integration
Data prepared for engineering review
Use the real HTML specification tables and clear mechanical drawing to compare the stage with the complete motion, chamber and feedthrough design.
Product modelSPHVC65C
Frame size65 mm
Motor power100 W
Ball screwØ12 mm
Repeatability±0.01–0.02 mm
Stroke100–600 mm standard, 50 mm increments
Discuss your SPHVC65C vacuum linear axis with our engineers.
Share the chamber pressure, temperature, radiation level, stroke, load, speed, acceleration, duty cycle and interface requirements for configuration review.
Contact us
Would you like to learn more about our solutions?
We would be happy to advise you—personally, competently, and tailored to your requirements.
Perfection in a new dimension
SPHVC65C Vacuum High & Low Temperature Linear Stage
SPHVC65C vacuum high & low temperature linear stage with a 65 mm frame, ±0.01–0.02 mm repeatability, 100 W servo drive, Ø12 mm ball screw, vacuum options down to 1 × 10⁻⁷ Pa and −196 to +200 °C temperature capability. Final configuration review is required.
Further Information
Short delivery times available for selected product configurations.
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