High performance and precision for sensitive electronic processes
Reliability
Robust and long-term solutions for high plant availability and process reliability.。
Connectivity
Seamless integration into digital production environments for networked and efficient processes.
Demanding environments
Cleanroom-compatible drive technology up to ISO Class 1 – also suitable for vacuum and special atmospheres.
Reliability
Robust and long-term solutions for high plant availability and process reliability.。
Maximum output
Maximum dynamics and precision for highly automated processes in semiconductor and electronics manufacturing.
Sustainability
Energy-efficient drive concepts to reduce resource consumption and emissions.
The Four Core Applications in the Discovery Industry
Smoothly pick up, align, and precisely transfer wafers inside the vacuum chamber.
In an ultra-high vacuum coating chamber with a pressure of 10⁻⁷ Pa, it controls the replacement of targets, the rotation of substrates, and the opening and closing of shutters.
Precision material handling and mask fine-adjustment mechanisms in a cleanroom environment ensure strict control over particle release.
Micron-level optical microscopy inspection stations and high-frequency, high-precision drives for die bonders.
Our product recommendations
750 W Vacuum Servo Motor
Closed-loop vacuum servo motor for precise positioning and stable motion in wafer handling, deposition, inspection and other controlled-environment semiconductor systems.
20/28 mm Vacuum Stepper Motor
SPGSPX065 Vacuum High & Low Temperature Gearbox
Vacuum-compatible planetary gearbox for clean, compact torque transmission in wafer handling, inspection stages and precision semiconductor motion axes.
SPV5A Vacuum Five-Axis Positioning Stage
Multi-axis vacuum positioning platform for precise sample alignment, wafer inspection and advanced semiconductor research equipment.
Contact us
Conquer extreme constraints with our uncompromised motion control. Connect with our experts to match your system dynamics and vacuum requirements.
Discover more industries
Precision Driving in Extreme Environments
Wide Temperature Range (-196°C to +150°C), Ultra-High Vacuum. Specially Designed for Space Simulation, Synchrotron Radiation, and Vacuum 5-Axis Sample Stages.
Industrial Automation and Intelligent Precision Manufacturing Industry
With ultra-compact linear transmission and large hollow-shaft direct drive solutions, breaking through space constraints and empowering high-frequency precision manufacturing.
In Vitro Diagnostics (IVD) and Medical Automation Industry
Core driving forces of high-speed refrigerated centrifugation and precision linear control, propelling medical automation to new heights.