
SP Vacuum Five-Phase Stepper Motor Series
SP vacuum five-phase stepper motor series combines 0.72° step resolution with 28, 42 and 60 mm frame options. Custom HV configurations are…
Vacuum-compatible motors, gearboxes and motion modules for equipment operating under reduced-pressure and controlled-environment conditions. Compare available product families, review real specifications and select the configuration that fits your system.



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SP vacuum five-phase stepper motor series combines 0.72° step resolution with 28, 42 and 60 mm frame options. Custom HV configurations are…

SPHYLI series vacuum linear motors provide direct-drive motion for vacuum systems using specialized insulation, low-outgassing materials and suitable surface treatment. Six motor…

The SPVC vacuum connector family provides hermetic electrical feedthroughs and in-vacuum plug-in interfaces for aerospace, vacuum coating, sensors and sealed equipment. Configurations…

Vacuum-compatible five-axis positioning stage with X/Y/Z linear motion, continuous R-axis rotation, T-axis tilt, multiple feedback options and operation below 5.0 × 10⁻⁷…

Vacuum-compatible rotary positioning stage series with Ø100–Ø400 mm tables, 360° travel, 0.005° repeatability, load capacity up to 120 kg, and application-specific 1…

Compact 85 mm vacuum gearbox with ratios from 3 to 1000, rated output torque up to 110 N·m, and application-specific 1 ×…

Compact 65 mm vacuum gearbox with ratios from 3 to 1000, rated output torque up to 44 N·m, and application-specific 1 ×…

Compact 45 mm vacuum gearbox with ratios from 3 to 1000, rated output torque up to 25 N·m, and application-specific 1 ×…
Start with the operating environment and motion requirement, then confirm mechanical fit and electrical integration against the product-level technical data.
Define vacuum level, temperature range, cleanliness and other environmental constraints.
Confirm load, speed, torque, travel, positioning accuracy and duty cycle.
Match frame size, mounting interface, shaft or screw configuration and available installation space.
Review supply, current, feedback, drive method and communication requirements before selection.
Share your required motor type, operating environment, quantity and technical requirements. Our engineering team will review the details and contact you.
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