Product category

Vacuum & Special-Environment Motion Systems

Vacuum-compatible motors, gearboxes and motion modules for equipment operating under reduced-pressure and controlled-environment conditions. Compare available product families, review real specifications and select the configuration that fits your system.

SP Vacuum Five-Phase Stepper Motor Series
SPHYLI Series Vacuum Linear Motor
SPVC Vacuum Connector

Available Products

SP Vacuum Five-Phase Stepper Motor Series

SP Vacuum Five-Phase Stepper Motor Series

Frame sizes
28 / 42 / 60 mm
Step angle
0.72°
Vacuum level
Down to 1 × 10⁻⁵ Pa

SP vacuum five-phase stepper motor series combines 0.72° step resolution with 28, 42 and 60 mm frame options. Custom HV configurations are…

SPHYLI Series Vacuum Linear Motor

SPHYLI Series Vacuum Linear Motor

Peak force
29–2,100 N
Continuous force
14–490 N
Vacuum level
1 × 10⁻⁷ Torr

SPHYLI series vacuum linear motors provide direct-drive motion for vacuum systems using specialized insulation, low-outgassing materials and suitable surface treatment. Six motor…

SPVC Vacuum Connector

SPVC Vacuum Connector

Connector formats
CF / KF / Square / In-vacuum
Contact count
2–55
Rated current
5–25 A per contact

The SPVC vacuum connector family provides hermetic electrical feedthroughs and in-vacuum plug-in interfaces for aerospace, vacuum coating, sensors and sealed equipment. Configurations…

SPV5A Vacuum Five-Axis Positioning Stage

SPV5A Vacuum Five-Axis Positioning Stage

Axes
X / Y / Z / R / T
Linear travel
150 / 150 / 65 mm
Vacuum level
< 5.0 × 10⁻⁷ Torr

Vacuum-compatible five-axis positioning stage with X/Y/Z linear motion, continuous R-axis rotation, T-axis tilt, multiple feedback options and operation below 5.0 × 10⁻⁷…

SPHVRA100/200/300/400 Vacuum High & Low Temperature Rotary Stage

SPHVRA100/200/300/400 Vacuum High & Low Temperature Rotary Stage

Table sizes
Ø100 / Ø200 / Ø300 / Ø400 mm
Repeatability
0.005°
Vacuum level
1 × 10⁻⁷ Pa

Vacuum-compatible rotary positioning stage series with Ø100–Ø400 mm tables, 360° travel, 0.005° repeatability, load capacity up to 120 kg, and application-specific 1…

Choose by application requirements

Start with the operating environment and motion requirement, then confirm mechanical fit and electrical integration against the product-level technical data.

01

Operating environment

Define vacuum level, temperature range, cleanliness and other environmental constraints.

02

Motion requirement

Confirm load, speed, torque, travel, positioning accuracy and duty cycle.

03

Mechanical integration

Match frame size, mounting interface, shaft or screw configuration and available installation space.

04

Electrical interface

Review supply, current, feedback, drive method and communication requirements before selection.

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