Direct-drive vacuum motion
Purpose-built for linear motion in vacuum systems and precision positioning assemblies.
SPHYLI Series Vacuum Linear Motor
Vacuum & Special-Environment Motion Systems
SPHYLI series vacuum linear motors provide direct-drive motion for vacuum systems using specialized insulation, low-outgassing materials and suitable surface treatment. Six motor families cover 29–2,100 N peak force and 14–490 N continuous force, with application-specific validation required.
Positioning accuracy
High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance
Compactness
High torque density thanks to high performance and short design
Low maintenance
Highest quality standards for a long service life and extended maintenance intervals
Technical data
Direct-drive motion for vacuum systems
One configurable motor family for precision vacuum motion
The SPHYLI series combines vacuum-oriented insulation, low-outgassing construction and direct-drive linear motion across six motor families and 25 model configurations.
Low-outgassing construction
Low-outgassing adhesives, epoxy systems and cables are combined with selected structural materials and surface finishes.
Configurable integration
Insulation, outgassing control, thermal management, dimensions and interfaces can be reviewed for each project.
Engineering information
Technical data
Compare the six SPHYLI motor families by force, electrical characteristics, thermal limits and motor length. All values are reference catalog values and require application-specific validation.
29–2,100 NPeak force
14–490 NContinuous force
1 × 10⁻⁷ TorrReference vacuum level
25Model configurations
Model family
SPHYLI1 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI101 | SPHYLI102 | SPHYLI103 | SPHYLI104 | SPHYLI105 |
|---|---|---|---|---|---|---|
| Peak force | N | 126 | 252 | 378 | 504 | 630 |
| Continuous force | N | 29 | 59 | 88 | 118 | 147 |
| Motor constant | N/√W | 2.9 | 5.8 | 7.1 | 8.2 | 9.2 |
| Max. continuous power | W | 101 | 102 | 152 | 203 | 254 |
| Peak current | Arms | 15.0 | 15.0 | 15.0 | 15.0 | 15.0 |
| Continuous current | Arms | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
| Resistance | Ω L-L | 2.1 | 3.0 | 4.5 | 6.0 | 7.5 |
| Inductance | mH L-L | 0.9 | 1.8 | 2.7 | 3.6 | 4.5 |
| Back-EMF constant | Vpeak/(m/s) L-L | 6.9 | 13.7 | 20.6 | 27.4 | 34.3 |
| Force constant | N/Arms | 8.4 | 16.8 | 25.2 | 33.6 | 42.0 |
| Electrical time constant | ms | 0.4 | 0.6 | 0.6 | 0.6 | 0.6 |
| Max. winding temperature | °C | 100 | 100 | 100 | 100 | 100 |
| Mover mass | kg | 0.30 | 0.45 | 0.60 | 0.75 | 0.90 |
| Stator mass per meter | kg/m | 7.7 | 7.7 | 7.7 | 7.7 | 7.7 |
| Pole pitch | mm | 30.00 | 30.00 | 30.00 | 30.00 | 30.00 |
| Motor length | mm | 74 | 134 | 194 | 254 | 314 |
Model family
SPHYLI2 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI201 | SPHYLI202 | SPHYLI203 | SPHYLI204 | SPHYLI205 |
|---|---|---|---|---|---|---|
| Peak force | N | 211 | 421 | 632 | 842 | 1,053 |
| Continuous force | N | 49 | 98 | 147 | 197 | 246 |
| Motor constant | N/√W | 5.0 | 8.4 | 10.3 | 11.9 | 13.3 |
| Max. continuous power | W | 96 | 136 | 203 | 271 | 339 |
| Peak current | Arms | 15.0 | 15.0 | 15.0 | 15.0 | 15.0 |
| Continuous current | Arms | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
| Resistance | Ω L-L | 2.0 | 4.0 | 6.0 | 8.0 | 10.0 |
| Inductance | mH L-L | 1.1 | 2.3 | 3.5 | 4.5 | 5.8 |
| Back-EMF constant | Vpeak/(m/s) L-L | 11.5 | 22.9 | 34.4 | 45.9 | 57.3 |
| Force constant | N/Arms | 14.0 | 28.1 | 42.1 | 56.2 | 70.2 |
| Electrical time constant | ms | 0.6 | 0.6 | 0.6 | 0.6 | 0.6 |
| Max. winding temperature | °C | 100 | 100 | 100 | 100 | 100 |
| Mover mass | kg | 0.50 | 0.80 | 1.00 | 1.25 | 1.45 |
| Stator mass per meter | kg/m | 12.0 | 12.0 | 12.0 | 12.0 | 12.0 |
| Pole pitch | mm | 30.00 | 30.00 | 30.00 | 30.00 | 30.00 |
| Motor length | mm | 74 | 134 | 194 | 254 | 314 |
Model family
SPHYLI3 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI301 | SPHYLI302 | SPHYLI303 | SPHYLI304 | SPHYLI305 |
|---|---|---|---|---|---|---|
| Peak force | N | 315 | 630 | 945 | 1,260 | 1,575 |
| Continuous force | N | 74 | 147 | 221 | 294 | 368 |
| Motor constant | N/√W | 6.1 | 10.3 | 12.6 | 14.6 | 16.3 |
| Max. continuous power | W | 145 | 203 | 305 | 407 | 508 |
| Peak current | Arms | 15.0 | 15.0 | 15.0 | 15.0 | 15.0 |
| Continuous current | Arms | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
| Resistance | Ω L-L | 3.0 | 6.0 | 9.0 | 12.0 | 15.0 |
| Inductance | mH L-L | 1.7 | 3.4 | 5.1 | 6.8 | 8.5 |
| Back-EMF constant | Vpeak/(m/s) L-L | 17.1 | 34.3 | 51.4 | 68.6 | 85.7 |
| Force constant | N/Arms | 21.0 | 42.0 | 63.0 | 84.0 | 105.0 |
| Electrical time constant | ms | 0.6 | 0.6 | 0.6 | 0.6 | 0.6 |
| Max. winding temperature | °C | 100 | 100 | 100 | 100 | 100 |
| Mover mass | kg | 0.80 | 1.10 | 1.50 | 1.70 | 2.00 |
| Stator mass per meter | kg/m | 17.8 | 17.8 | 17.8 | 17.8 | 17.8 |
| Pole pitch | mm | 30.00 | 30.00 | 30.00 | 30.00 | 30.00 |
| Motor length | mm | 74 | 134 | 194 | 254 | 314 |
Model family
SPHYLI4 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI401 | SPHYLI402 | SPHYLI403 | SPHYLI404 | SPHYLI405 |
|---|---|---|---|---|---|---|
| Peak force | N | 420 | 840 | 1,260 | 1,680 | 2,100 |
| Continuous force | N | 98 | 196 | 294 | 392 | 490 |
| Motor constant | N/√W | 7.2 | 12.2 | 15.0 | 17.3 | 19.3 |
| Max. continuous power | W | 183 | 258 | 386 | 515 | 644 |
| Peak current | Arms | 15.0 | 15.0 | 15.0 | 15.0 | 15.0 |
| Continuous current | Arms | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
| Resistance | Ω L-L | 3.8 | 7.6 | 11.4 | 15.2 | 19.0 |
| Inductance | mH L-L | 2.2 | 4.4 | 6.6 | 8.8 | 11.0 |
| Back-EMF constant | Vpeak/(m/s) L-L | 22.9 | 45.7 | 68.6 | 91.4 | 114.3 |
| Force constant | N/Arms | 28.0 | 56.0 | 84.0 | 112.0 | 140.0 |
| Electrical time constant | ms | 0.6 | 0.6 | 0.6 | 0.6 | 0.6 |
| Max. winding temperature | °C | 100 | 100 | 100 | 100 | 100 |
| Mover mass | kg | 1.00 | 1.30 | 1.70 | 2.00 | 2.40 |
| Stator mass per meter | kg/m | 26.7 | 26.7 | 26.7 | 26.7 | 26.7 |
| Pole pitch | mm | 30.00 | 30.00 | 30.00 | 30.00 | 30.00 |
| Motor length | mm | 74 | 134 | 194 | 254 | 314 |
Model family
SPHYLI5 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI501 | SPHYLI502 |
|---|---|---|---|
| Peak force | N | 41 | 83 |
| Continuous force | N | 17 | 34 |
| Motor constant | N/√W | 2.7 | 4.5 |
| Max. continuous power | W | 40 | 59 |
| Peak current | Arms | 2.4 | 2.4 |
| Continuous current | Arms | 1.0 | 1.0 |
| Resistance | Ω L-L | 10.6 | 21.2 |
| Inductance | mH L-L | 7.6 | 14.2 |
| Back-EMF constant | Vpeak/(m/s) L-L | 14.0 | 28.1 |
| Force constant | N/Arms | 17.2 | 34.4 |
| Electrical time constant | ms | 0.7 | 0.7 |
| Max. winding temperature | °C | 90 | 90 |
| Mover mass | kg | 0.10 | 0.16 |
| Stator mass per meter | kg/m | 3.0 | 3.0 |
| Pole pitch | mm | 24.00 | 24.00 |
| Motor length | mm | 60 | 108 |
Model family
SPHYLI6 vacuum linear motor
Values shown for the available motor-length configurations.
| Parameter | Unit | SPHYLI601 | SPHYLI602 | SPHYLI603 |
|---|---|---|---|---|
| Peak force | N | 29 | 58 | 87 |
| Continuous force | N | 14 | 29 | 43 |
| Motor constant | N/√W | 2.4 | 4.0 | 4.8 |
| Max. continuous power | W | 37 | 54 | 81 |
| Peak current | Arms | 4.2 | 4.2 | 4.2 |
| Continuous current | Arms | 2.1 | 2.1 | 2.1 |
| Resistance | Ω L-L | 2.2 | 4.4 | 6.6 |
| Inductance | mH L-L | 1.6 | 3.2 | 4.7 |
| Back-EMF constant | Vpeak/(m/s) L-L | 5.6 | 11.3 | 16.9 |
| Force constant | N/Arms | 6.9 | 13.8 | 20.7 |
| Electrical time constant | ms | 0.7 | 0.7 | 0.7 |
| Max. winding temperature | °C | 90 | 90 | 90 |
| Mover mass | kg | 0.10 | 0.14 | 0.18 |
| Stator mass per meter | kg/m | 3.3 | 3.3 | 3.3 |
| Pole pitch | mm | 22.50 | 22.50 | 22.50 |
| Motor length | mm | 54 | 100 | 145 |
Common reference specifications: insulation class F; dielectric withstand 1,500 V for 60 s; insulation resistance >10 MΩ at 500 V DC. Application temperature: 0 to 40 °C. Application-specific validation and thermal assessment are required.
Configured around your vacuum system
Match force, length and materials to the application
Select the required peak force, continuous force and motor length, then confirm vacuum level, stroke, duty cycle and operating voltage for the application.
- Reference vacuum level of 1 × 10⁻⁷ Torr
- Project review for insulation and outgassing requirements
- Configurable thermal, mechanical and electrical integration
Application fields
Direct-drive motion for controlled vacuum environments
The SPHYLI family supports vacuum equipment that needs configurable force, compact mechanical integration and low-outgassing material choices.
Vacuum deposition
Direct-drive linear motion for deposition and vacuum processing equipment.
Semiconductor systems
Configurable vacuum motion for semiconductor manufacturing equipment.
Research chambers
Linear motion for research chambers and laboratory vacuum assemblies.
Precision positioning
Direct-drive motion for equipment requiring precise linear positioning.
System integration
Define the operating conditions before final configuration
Share the chamber pressure, force, stroke, duty cycle and interface requirements so insulation, materials and thermal management can be reviewed together.
Reference vacuum level1 × 10⁻⁷ Torr
Application temperature0 to 40 °C
Insulation classClass F
Dielectric withstand1,500 V / 60 s
Insulation resistance>10 MΩ at 500 V DC
Discuss your vacuum linear motion requirement with our engineers.
Share vacuum level, force, stroke, duty cycle and mechanical interface requirements for model selection and integration review.
Contact us
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We would be happy to advise you—personally, competently, and tailored to your requirements.
Perfection in a new dimension
SPHYLI Series Vacuum Linear Motor
SPHYLI series vacuum linear motors provide direct-drive motion for vacuum systems using specialized insulation, low-outgassing materials and suitable surface treatment. Six motor families cover 29–2,100 N peak force and 14–490 N continuous force, with application-specific validation required.
Further Information
Short delivery times available for selected product configurations.
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