High-power servo motion
Delivers 3.18 N·m rated torque at 3000 rpm for higher-load precision axes.
1000 W Vacuum Servo Motor
Vacuum Servo Motor
High-performance 1000 W vacuum servo motor with 3.18 N·m rated torque, 9.54 N·m maximum torque, 3000 rpm rated speed, 110 / 220 V winding options and resolver configurations rated to 1 × 10⁻⁷ Pa.
Positioning accuracy
High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance
Compactness
High torque density thanks to high performance and short design
Low maintenance
Highest quality standards for a long service life and extended maintenance intervals
Technical data
1000 W vacuum servo platform
High-power closed-loop motion for demanding vacuum equipment
The SPVS1000W combines 1000 W rated output with 3.18 N·m rated torque, 3000 rpm rated speed, selectable feedback, and verified vacuum and temperature limits.
Vacuum-ready configurations
Resolver and absolute-encoder configurations support special environments, with application-specific vacuum options down to 1.0 × 10−7 Pa.
Flexible system integration
Multiple voltage windings, brake, vacuum-rated cabling, feedthrough interfaces and temperature-sensor options support different machine architectures.
Technical data
Electrical, environmental and connection data
Review the electrical, environmental and connection data below. Confirm the final winding, feedback, brake and vacuum configuration before design release.
Electrical performance
1000 W voltage-specific data
Four-pole and five-pole configurations use different rated operating points.
| Parameter | Unit | 110 V | 220 V |
|---|---|---|---|
| Pole pairs | — | 5 | 5 |
| Rated power | W | 1000 | 1000 |
| Rated torque | N·m | 3.18 | 3.18 |
| Rated speed | rpm | 3000 | 3000 |
| Rated current | A | 12.5 | 5.4 |
| Maximum torque | N·m | 9.54 | 9.54 |
| Maximum current | A | 37.5 | 16.2 |
| Maximum speed | rpm | 4000 | 4000 |
| Line resistance (±10%) | Ω | 0.39 | 1.5 |
| Line inductance (±10%) | mH | 1.66 | 8.79 |
| Back EMF (±10%) | V/Krpm | 15.62 | 36.98 |
| Rotor inertia without brake | kg·cm² | 2.057 | |
| Rotor inertia with brake | kg·cm² | 2.153 | |
Environmental data
General specifications
Feedback-specific vacuum and temperature limits are shown separately.
| Specification | Resolver configuration | Other encoder configurations |
|---|---|---|
| Feedback options | Resolver, Hall, incremental, multi-turn absolute encoder | |
| Feedback vacuum limit | 1 × 10−7 Pa | Limit: 1 × 10−4 Pa |
| Feedback operating temperature | −196°C to +200°C | −40°C to +105°C |
| Insulation class | F | F |
| Protection | IP54 (excluding shaft end) | IP54 (excluding shaft end) |
| Weight without brake | 3 kg | 3 kg |
| Weight with brake | 3.5 kg | 3.5 kg |
Mechanical interface
Dimensions and connection data
Use the drawing and dimension table for preliminary envelope review. Final dimensions depend on the selected brake, feedback and cable interface.
Mechanical data
Envelope and mounting
| Item | Value |
|---|---|
| Flange size | 80 mm square |
| Motor body height | 93 mm |
| Shaft diameter | Ø19 mm |
| Shaft extension | 35 ± 1 mm |
| Motor body length | 145 ± 1.5 mm |
| Overall length with brake | 177 ± 1.5 mm |
| Mounting holes | 4 × Ø6.50 through |
| Bolt circle | PCD Ø90 mm |
| Threaded feature | M5, depth 10 mm |
Connection data
Power and brake wiring
| Pin | Signal | Wire color |
|---|---|---|
| 1 | U | Red |
| 2 | V | White |
| 3 | W | Black |
| 4 | PE | Green |
| 5 | B+ | Yellow |
| 6 | B− | Brown |
Connection data
Resolver wiring
| Pin | Signal | Wire color |
|---|---|---|
| 1 | Cos+ | Red |
| 2 | Cos− | Black |
| 3 | Ref+ | Green |
| 4 | Ref− | White |
| 5 | Sin+ | Yellow |
| 6 | Sin− | Blue |
| 7 | PE | Shield |
Connection data
Absolute encoder wiring
| Pin | Signal | Wire color |
|---|---|---|
| 1 | 485+ | Blue |
| 2 | 485− | Yellow |
| 3 | VCC+ | Red |
| 4 | GND− | Black |
| 5 | Battery+ | Green |
| 6 | Battery− | White |
| 7 | PE | Shield |
Performance data
Operating-point information
| Item | Value |
|---|---|
| Rated operating point | 3.18 N·m at 3000 rpm |
| Maximum torque | 9.54 N·m |
| Maximum speed | 4000 rpm |
| Validated torque-speed curve | Supplied after confirming voltage, feedback, brake, vacuum, temperature and duty-cycle requirements. |
Vacuum servo integration
Configure the motor around the real operating environment
Final selection should consider chamber pressure, voltage, torque-speed duty cycle, feedback, brake, temperature, cabling and feedthrough requirements.
- Confirm the required vacuum and temperature grade
- Use the 5-pole-pair electromagnetic platform
- Choose the winding voltage for the machine power architecture
- Select resolver, Hall, incremental or multi-turn absolute feedback
- Validate the brake, cable, sensor and chamber-interface options
Application fields
Higher-load servo motion for controlled and special environments
The 1000 W platform supports precision axes that need greater torque while conventional industrial servo motors cannot satisfy vacuum and temperature requirements.
Semiconductor equipment
Closed-loop positioning for process chambers, transfer mechanisms and inspection systems.
Vacuum coating
Higher-load motion for deposition, handling and chamber automation equipment.
Scientific instruments
Precision servo axes for analytical equipment and large laboratory vacuum chambers.
Special-environment systems
Application-specific configurations for cryogenic, elevated-temperature and controlled-vacuum environments.
System integration
Clear data for faster machine design
Use the voltage-specific performance tables, feedback limits, mechanical drawing and wiring definitions to review the motor with the complete drive and vacuum system.
Product modelSPVS1000W
Rated power1000 W
Rated torque3.18 N·m
Rated speed3000 rpm
Rated voltage110 / 220 V
FeedbackResolver, Hall, incremental or multi-turn absolute encoder
Discuss your 1000 W vacuum servo axis with our engineers.
Share the chamber pressure, temperature, load, speed, duty cycle, voltage, feedback and brake requirements for configuration review.
Contact us
Would you like to learn more about our solutions?
We would be happy to advise you—personally, competently, and tailored to your requirements.
Perfection in a new dimension
Further Information
Short delivery times available for selected product configurations.
The TP+ HIGH TORQUE enables maximum torque density and maximum torsional rigidity—ideal for demanding applications with dynamic load changes and high positioning accuracy.
alpha Advanced Line gearboxes with increased durability and food-grade lubrication available.
The TP+ for coordinated pinion-rack systems for medium to high requirements. Typical areas of application in wood, plastic, and composite processing, in machining centers, or in automation.
With cynapse® and smart services, you can unleash the full potential of your drive system: sensor data is processed, visualized, and analyzed intelligently. Find out how the combination of gearboxes with cynapse® and our Smart Services can make your digital production faster, safer, and more efficient.
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