High performance and precision for sensitive electronic processes
Reliability
Robust and long-term solutions for high plant availability and process reliability.。
Connectivity
Seamless integration into digital production environments for networked and efficient processes.
Demanding environments
Cleanroom-compatible drive technology up to ISO Class 1 – also suitable for vacuum and special atmospheres.
Reliability
Robust and long-term solutions for high plant availability and process reliability.。
Maximum output
Maximum dynamics and precision for highly automated processes in semiconductor and electronics manufacturing.
Sustainability
Energy-efficient drive concepts to reduce resource consumption and emissions.
The Four Core Applications in the Discovery Industry
In a simulated space environment, the test turntable and infrared calibration source inside the propulsion module must withstand an extremely wide temperature range from -196°C to +150°C.
Precision positioning of aerospace sensors and antenna pointing mechanisms during ground testing.
Vacuum-based, five-axis precision sample stage for SEM (scanning electron microscope) and TEM (transmission electron microscope).
High-resolution, nanometer-scale fine-tuning of beamline monochromators and slit mechanisms in an ultra-high vacuum environment.
Our product recommendations
57 mm Vacuum Stepper Motor
Vacuum-compatible stepper motor for repeatable positioning in electron microscopy, sample stages, space simulation equipment and other demanding vacuum systems.
400 W Vacuum Servo Motor
Closed-loop vacuum servo platform for precision axes in thermal-vacuum chambers, scientific instruments and other demanding high-vacuum systems.
SPGSPX085 Vacuum High & Low Temperature Gearbox
Compact vacuum-compatible gearbox for precision axes requiring controlled backlash, stable torque transmission and dependable operation across demanding temperature environments.
SPHVRA100/200/300/400 Vacuum High & Low Temperature Rotary Stage
Vacuum rotary stage series with full 360° travel for controlled sample and instrument positioning in space simulation, beamline and high-vacuum research systems.
Contact us
Conquer extreme constraints with our uncompromised motion control. Connect with our experts to match your system dynamics and vacuum requirements.
Discover more industries
In Vitro Diagnostics (IVD) and Medical Automation Industry
Core driving forces of high-speed refrigerated centrifugation and precision linear control, propelling medical automation to new heights.
Industrial Automation and Intelligent Precision Manufacturing Industry
With ultra-compact linear transmission and large hollow-shaft direct drive solutions, breaking through space constraints and empowering high-frequency precision manufacturing.
Semiconductor Manufacturing and Testing Equipment Industry
Challenging the ultimate vacuum of 10⁻⁷ Pa, micron-level precision drives empower wafer manufacturing and inspection.