Vacuum compatibility
Supports equipment architectures that require clean materials and reliable operation under vacuum.
Vacuum Servo Motor Series
Vacuum Servo Motor (10⁻⁷ Pa)
Vacuum-compatible servo motor designed for precise closed-loop motion, controlled environments and demanding high-vacuum equipment.
Positioning accuracy
High torsional rigidity and constant torsional backlash over the entire gearbox service life ensure consistently high performance
Compactness
High torque density thanks to high performance and short design
Low maintenance
Highest quality standards for a long service life and extended maintenance intervals
Technical data
Closed-loop motion for vacuum equipment
Precise servo performance for controlled vacuum environments
A dedicated motor platform for accurate positioning and reliable operation inside advanced vacuum systems.
Closed-loop control
Enables accurate position and speed regulation for dynamic machine axes.
Integration flexibility
Product drawings and rated data support mechanical, electrical and controller planning.
Engineering information
Technical data
Original model-specific ratings, dimensions, curves and connection information are preserved below for engineering review.
Engineering data
Coding Rules
| Specification | Value |
|---|---|
| Company symbol | |
| 2 | Motor frame type: SV: square motor; AM: Round stainless steel motor |
| Frame size[mm}:40、60、80、110、130… | |
| ④ | Supply Voltage: B: DC24V、D: DC48V、Q: AC110V、L: AC220V、H: AC380V、X: 0ther |
| protocol encoder; HA: Hall(brushless) | |
| Rated p0werfw): 50、100、200、400、750、1000、1800、2600、3800、5500.. | |
| Brake controller: BK: with brake; None; Ts: Thermocouple | |
| Vacuum environment(Pa): Low vacuum(LV): 102~10-1; High vacuum(Hv): 10-1 ~10-5; Ultra high vacuum(UHv): < 10-5; | |
| 8 | Radiation dosage(Gry): Low radiation LRA: Less than 10?; High radiation (HRA): 103 ~105; |
| Ultra high radiationfURA): 10e; Clean motor: JJ | |
| S8+961- :115 :007+.07- :1HS :051+07- :15 :58+.04- :17-12 :58+,07- :12 :0.145404a 1102 | |
| Lx-Hxx: Low (L)-High{H} temperature customization; xx: Specific temperature | |
| Pole of Pairs: 4: 4 pairs of poles; 5: 54 pairs of poles | |
| 11 | Type of joint: None: Default aviation plug; MH: Waterproof plug: X: without plug |
| 12 | Outgoing line length at motor end: None: Default outgoing line 0.5M; 3M: Individually equipped with 3m line; 5M: |
| Outgoing line at motor end 5m |
Engineering data
Model Specifications
| Servo Motor Series | 50W | 100W | 400W | |
|---|---|---|---|---|
| Pole Of Pairs | 5 | 5 | 4 | 5 |
| Rated Voltage(V) | 24 / 48 / 220 | 24 / 48 / 220 | 24 / 48 / 110 / 220 / 380 | 24 / 48 / 110 / 220 / 380 |
| Rated Power(W) | 50 | 100 | 400 | 400 |
| Rated Torque(N.m) | 0.16 | 0.32 | 1.28 | 1.28 |
| Rated Speed(rpm) | 3000 | 3000 | 3000 | 3000 |
| Rated Current[A) | 2.8 / 2.2 / 1.2 | 5 / 2.94 / 1.2 | 23.56 / 11.78 / 5.4 / 2.4 / 1.4 | 23.5 / 11.6 / 4.6 / 2.3 / 1.3 |
| Maximum Torque[N.m] | 0.48 | 0.96 | 3.84 | 3.84 |
| Maximum Current(A) | 9 / 6.6 / 3.6 | 15 / 8.82 / 3.6 | 70.68 / 35.34 / 16.2 / 7.2 / 4.2 | 70.5 / 34.8 / 13.8 / 6.9 / 3.9 |
| Maximum Speed(rpm) | 4000 | 4000 | 4000 | 4000 |
| Line Resistance[±10%0) | 2.15 / 4.15 / 9.1 | 0.67 / 2.49 / 14.22 / 0.08 | 0.34 / 1.73 / 4.75 / 12.1 | 0.075 / 0.312 / 1.62 / 7.17 / 20.5 |
| Line Inductance(±10%mH) | 2.52 / 4.52 / 8.6 | 0.66 / 2.7 / 13.26 / 0.24 | 0.79 / 3.33 / 12.73 / 31.6 | 0.153 / 0.761 / 3.24 / 17.51 / 17.51 |
| Force( ±10%v/Krpm) / Counter Electromotive | 4 / 6.06 / 9.6 | 3.97 / 7.35 / 15.78 / 3.8 | 7.77 / 16.01 / 31.22 / 49.3 | 3.64 / 7.79 / 17.37 / 38.8 / 38.8 |
| No BK:0.0535 | No BK:0.089 | No BK:0.294 | No BK:0.555 | |
| Moment Of Inertia(kg-cm') | With BK:0.0524 | With BK:0.092 | With BK:0.303 | With BK:0.567 |
| Feedback Device | Optional: Rotary feedback, multi turn absolute value encoder | |||
| Insulation Class Protection | F | |||
| Grade | IP54 | |||
| Weight(kg) | No BK:0.5 with BK:0.6 | No BK:0.7 With BK:0.8 | No BK:1.5 with BK:1.7 | |
| Vacuum Environment(Pa) | Rotary feedback: 1 x 10 A -5Pa, multi turn absolute value: limit 1 x 10 A -4Pa | |||
| Work Environment(°C) | Rotary feedback: -196r+180 °C, multi turn absolute value: -40r+105 °C |
Engineering data
Model Specifications
| ServoMotorSeries | 750W | 1000W | ||
|---|---|---|---|---|
| Pole Of Pairs | 4 | 5 | 4 | 5 |
| Rated Voltage(V) | 48 / 220 / 380 | 48 / 110 / 220 / 380 | 48 / 220 / 380 | 110 / 220 |
| Rated Power(W) | 750 | 750 | 1000 | 1000 |
| Rated Torque(N.m) | 2.39 | 2.39 | 4.5 | 3.18 |
| Rated Speed(rpm) | 3000 | 3000 | 2500 | 3000 |
| Rated Current[A) | 22.09 / 3 / 1.5 | 22.09 / 8.5 / 4.3 / 2.9 | 29.46 / 4.6 / 2.3 | 13.1 / 5.4 |
| Maximum Torque(N.m] | 7.17 | 7.17 | 13.5 | 9.54 |
| Maximum Current(A] | 66.27 / 9 / 4.5 | 66.27 / 25.5 / 12.9 / 8.7 | 88.38 / 13.8 / 6.9 | 39.3 / 16.2 |
| Maximum Speed(rpm) | 4000 | 4000 | 3500 | 4000 |
| Line Resistance(±10%0] | 0.14 / 2.54 / 10.16 | 0.59 / 0.47 / 1.73 / 5.2 | 0.06 / 4.06 / 16.24 | 0.336 / 1.5 |
| Line Inductance[±10%mH) | 0.47 / 15.48 / 61.92 | 0.35 / 2.57 / 9.94 / 28 | 0.375 / 31.38 / 125.5 | 1.665 / 8.79 |
| Force( ±10%v/Krpm) / Counter Electromotive | 8.01 / 46.66 / 93.32 | 7.83 / 16.61 / 34.3 / 55 | 8 / 64.4 / 128.8 | 16.9 / 36.98 |
| Moment Of Inertia(kg-cm') | No BK:1.188 | No BK:1.618 | No BK:1.435 | No BK:2.057 |
| With BK:1.292 | With BK:1.712 | With BK:1.445 | With BK:2.153 | |
| Feedback Device | Optional: Rotary feedback, multi turn absolute value encoder | |||
| Insulation Class Protection | F | |||
| Grade | IP54 | |||
| Weight(kg) | No BK:2.7 With BK:3.2 | No BK:3 With BK:3.5 | ||
| Vacuum Environment( Pa) | Rotary feedback: 1 x 10 A -5Pa, multi turn absolute value: limit 1 x 10 A -4Pa | |||
| Work Environment(?c) | Rotary feedback: -196~+180 °C, multi turn absolute value: -40^+105 °C |
Engineering data
Model Specifications
| ServoMotorSeries | 1800W | 2600W | 3800W | 5500W |
|---|---|---|---|---|
| Pole Of Pairs | 5 | 5 | 5 | 5 |
| Rated Voltage(V) | 110 / 220 | 220 / 380 | 110 / 220 / 380 | 220 |
| Rated Power(w) | 1800 | 2600 | 3800 | 5500 |
| Rated Torque(N.m) | 6.88 | 9.93 | 15 | 26.26 |
| Rated Speed(rpm) | 2500 | 2500 | 2500 | 2000 |
| Rated Current(A) | 15 / 7.5 | 10 / 5.8 | 27 / 13.5 / 7.5 | 31.4 |
| Maximum Torque(N.m) | 20.63 | 29.8 | 45 | 78.78 |
| Maximum Current(A) | 45 / 22.5 | 30 / 17.4 | 81 / 40.5 / 22.5 | 94.2 |
| Maximum Speed(rpm) | 3000 | 3000 | 3000 | 3000 |
| Line Resistance[±10%0] | 0.22 / 0.85 | 0.434 / 1.45 | 0.071 / 0.277 / 0.85 | 0.264 |
| Line Inductance[±10%mH] | 2.8 / 10.3 | 2.83 / 7.83 | 0.459 / 2 / 5.6 | 1.98 |
| Counter Electromotive Force( ±10%v/Krpm) | 28.73 / 57.11 | 67.67 / 115.26 | 35.89 / 74.92 / 132 | 60.7 |
| Moment Of Inertia(kg-cm?) | No BK:5.458 With BK:5.977 | No BK:18.927 WWith BK:19.757 | No BK:31.048 With BK:31.878 | No BK:73 with BK: 75.5 |
| Feedback Device | Optional: Rotary feedback, multi turn absolute value encoder | |||
| Insulation Class Protection | F | |||
| Grade | IP54 | |||
| Weight(kg) | No BK:6.3 With BK:7.2 | No BK:9 with BK:10.2 | No BK:13.2 With BK:14.3 | No BK:22 with BK: 24 |
| Vacuum Environment(Pa) | Rotary feedback: 1 x 10 A -5Pa, multi turn absolute value: limit 1 x 10 A -4Pa | |||
| Work Environment(°c) | Rotary feedback: -196r+180 °C, multi turn absolute value: -40^+105 °C |
Always confirm the final operating point and installation conditions with Spotlight Motor engineering support.
System integration
Plan the complete vacuum motion axis with confidence
Confirm the required vacuum level, load profile, feedback interface, cable routing and thermal conditions during system design.
- Validate target vacuum level and allowable materials
- Match torque and speed to the complete duty cycle
- Plan feedback, cabling and feedthrough interfaces
Application fields
Designed for demanding vacuum automation
A practical fit for precision motion tasks where vacuum compatibility and servo control are both essential.
Semiconductor tools
Transfer, alignment and process-support motion.
Vacuum coating
Positioning axes for deposition and coating equipment.
Laboratory systems
Research chambers, test rigs and analytical instruments.
Precision stages
Closed-loop rotary and linear positioning assemblies.
Discuss your Vacuum Servo Motor-1 requirement with our engineers.
Share your load, speed, duty cycle, controller and installation requirements for model selection and integration support.
Contact us
Would you like to learn more about our solutions?
We would be happy to advise you—personally, competently, and tailored to your requirements.
Perfection in a new dimension
Further Information
Short delivery times available for selected product configurations.
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