{"id":4944,"date":"2026-07-29T10:04:34","date_gmt":"2026-07-29T10:04:34","guid":{"rendered":"https:\/\/spotlight-motor.com\/?post_type=product&#038;p=4944"},"modified":"2026-07-29T12:32:04","modified_gmt":"2026-07-29T12:32:04","slug":"spv5a-vacuum-five-axis-positioning-stage","status":"publish","type":"product","link":"https:\/\/spotlight-motor.com\/zh\/product\/spv5a-vacuum-five-axis-positioning-stage\/","title":{"rendered":"SPV5A \u771f\u7a7a\u4e94\u8f74\u5b9a\u4f4d\u5e73\u53f0"},"content":{"rendered":"<style>body.postid-4944 { overflow-x: hidden; } body.postid-4944 [data-id=\"4e2fba0\"], body.postid-4944 [data-id=\"169d9d5\"], body.postid-4944 [data-id=\"4ab745c\"], body.postid-4944 [data-id=\"a65d5ba\"], body.postid-4944 [data-id=\"77d8c47\"], body.postid-4944 [data-id=\"79389ad\"], body.postid-4944 [data-id=\"8d9b055\"], body.postid-4944 [data-id=\"6b8732b\"], body.postid-4944 [data-id=\"bc89a15\"] { display: none !important; } body.postid-4944 [data-id=\"9b05c0a\"], body.postid-4944 [data-id=\"166d5d9\"], body.postid-4944 [data-id=\"166d5d9\"] > .elementor-widget-container { width: 100% !important; 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} .sl-data-table td:first-child { color: #18222c; font-weight: 600; } .sl-data-table--compact { min-width: 0; } @media (max-width: 767px) { .sl-parameter-layout { grid-template-columns: 1fr; gap: 16px; } .sl-parameter-panel--wide { grid-column: auto; } .sl-parameter-head { align-items: flex-start; flex-direction: column; gap: 12px; padding: 24px 20px 20px; } .sl-parameter-head h3 { font-size: 20px; } .sl-data-table { min-width: 620px; font-size: 14px; } .sl-data-table--compact { min-width: 520px; } .sl-data-table th, .sl-data-table td { padding: 14px 16px; } } .sl-product-page a{-webkit-tap-highlight-color:transparent}.sl-product-page a:focus:not(:focus-visible){outline:none}.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 120px)!important;z-index:120}.sl-product-page section[id]{scroll-margin-top:210px}@media(max-width:1024px){.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 86px)!important}.sl-product-page section[id]{scroll-margin-top:176px}}@media(max-width:767px){.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 72px)!important}.sl-product-page section[id]{scroll-margin-top:154px}}@media (max-width: 767px) { .sl-product-page .sl-tech-grid { grid-template-columns: minmax(0, 1fr) !important; } .sl-product-page .sl-tech-card { min-width: 0 !important; width: 100% !important; } .sl-product-page .sl-tech-card img { width: 100% !important; max-width: 100% !important; height: auto !important; } .sl-product-page .sl-tech-card .sl-table-scroll { width: 100% !important; min-width: 0 !important; max-width: 100% !important; } }<\/style>\n<div class=\"sl-product-page\">\n<nav class=\"sl-fullbleed sl-detail-nav\" aria-label=\"Product detail navigation\">\n<div class=\"sl-inner sl-detail-nav__inner\"><a href=\"#sl-features\">Overview<\/a><a href=\"#sl-technical\">Technical data<\/a><a href=\"#sl-integration\">Integration<\/a><a href=\"#sl-applications\">Applications<\/a><a href=\"#sl-consultation\">Consultation<\/a><\/div>\n<\/nav>\n<section id=\"sl-features\" class=\"sl-fullbleed sl-section sl-features\">\n<div class=\"sl-inner\">\n<p class=\"sl-kicker\">Vacuum five-axis positioning<\/p>\n<h2 class=\"sl-title\">Coordinated X, Y, Z, rotation and tilt in one platform<\/h2>\n<p class=\"sl-lead\">The SPV5A combines three linear axes with continuous rotation and precision tilt for sample positioning inside high-vacuum instruments. Its open mechanical architecture supports direct chamber integration, central optical access and application-specific drive selection.<\/p>\n<div class=\"sl-feature-grid\">\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\"><svg viewBox=\"0 0 48 48\" aria-hidden=\"true\"><path d=\"M8 24h32M24 8v32M13 13l22 22\"\/><path d=\"M35 18v17H18\"\/><\/svg><\/div>\n<h3>Five-axis motion<\/h3>\n<p>X, Y and Z translation are combined with R-axis rotation and T-axis tilt for coordinated spatial positioning.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\"><svg viewBox=\"0 0 48 48\" aria-hidden=\"true\"><circle cx=\"24\" cy=\"24\" r=\"15\"\/><circle cx=\"24\" cy=\"24\" r=\"4\"\/><path d=\"M24 9v7M24 32v7M9 24h7M32 24h7\"\/><\/svg><\/div>\n<h3>Central optical access<\/h3>\n<p>The hollow-axis arrangement can provide a clear central path for beams, samples, sensors or microscopy assemblies.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\"><svg viewBox=\"0 0 48 48\" aria-hidden=\"true\"><path d=\"M10 34h28M14 34V17h20v17M19 17V11h10v6\"\/><path d=\"M18 25h12\"\/><\/svg><\/div>\n<h3>Vacuum-ready integration<\/h3>\n<p>Configurations can be reviewed for vacuum levels below 5.0 \u00d7 10\u207b\u2077 Torr, selected motors, feedback devices and chamber interfaces.<\/p>\n<\/article>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-technical\" class=\"sl-fullbleed sl-section sl-tech\">\n<div class=\"sl-inner\">\n<p class=\"sl-kicker\">Technical data<\/p>\n<h2 class=\"sl-title\">Five coordinated axes with application-specific control<\/h2>\n<p class=\"sl-lead\">The values below are transcribed from the supplied source data. Final performance is confirmed against payload, cable routing, chamber pressure, feedback method and motion profile.<\/p>\n<div class=\"sl-spec-grid\">\n<div class=\"sl-spec\"><strong>5 axes<\/strong><span>X \/ Y \/ Z \/ R \/ T<\/span><\/div>\n<div class=\"sl-spec\"><strong>150 \u00d7 150 \u00d7 65 mm<\/strong><span>Linear travel<\/span><\/div>\n<div class=\"sl-spec\"><strong>360\u00b0<\/strong><span>Continuous rotation<\/span><\/div>\n<div class=\"sl-spec\"><strong>&lt; 5.0 \u00d7 10\u207b\u2077 Torr<\/strong><span>Vacuum level<\/span><\/div>\n<\/div>\n<div class=\"sl-parameter-layout\">\n<section class=\"sl-parameter-panel sl-parameter-panel--wide\">\n<div class=\"sl-parameter-head\">\n<div>\n<p class=\"sl-kicker\">Axis specifications<\/p>\n<h3>SPV5A motion parameters<\/h3>\n<\/div>\n<p>Linear-axis values are stated in millimetres and micrometres; rotary-axis values are stated in degrees and arcseconds.<\/p>\n<\/div>\n<div class=\"sl-table-scroll\" role=\"region\" aria-label=\"SPV5A five-axis positioning stage parameter table\" tabindex=\"0\">\n<table class=\"sl-data-table\">\n<thead>\n<tr>\n<th>Parameter<\/th>\n<th>X<\/th>\n<th>Y<\/th>\n<th>Z<\/th>\n<th>R<\/th>\n<th>T<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<th>Axis type<\/th>\n<td>Linear<\/td>\n<td>Linear<\/td>\n<td>Linear<\/td>\n<td>Rotary<\/td>\n<td>Tilt<\/td>\n<\/tr>\n<tr>\n<th>Travel<\/th>\n<td>150 mm<\/td>\n<td>150 mm<\/td>\n<td>65 mm<\/td>\n<td>360\u00b0 continuous<\/td>\n<td>\u221210\u00b0 to +80\u00b0<\/td>\n<\/tr>\n<tr>\n<th>Lead<\/th>\n<td>2 mm<\/td>\n<td>2 mm<\/td>\n<td>2 mm<\/td>\n<td>\u2014<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<th>Repeatability<\/th>\n<td>\u00b15 \u03bcm<\/td>\n<td>\u00b15 \u03bcm<\/td>\n<td>\u00b15 \u03bcm<\/td>\n<td>\u00b13 arcsec<\/td>\n<td>\u00b13 arcsec<\/td>\n<\/tr>\n<tr>\n<th>Parallelism<\/th>\n<td>\u00b125 \u03bcm<\/td>\n<td>\u00b125 \u03bcm<\/td>\n<td>\u00b125 \u03bcm<\/td>\n<td>\u2014<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<th>Maximum speed<\/th>\n<td>10 mm\/s<\/td>\n<td>10 mm\/s<\/td>\n<td>2 mm\/s<\/td>\n<td>15\u00b0\/s<\/td>\n<td>4\u00b0\/s<\/td>\n<\/tr>\n<tr>\n<th>XY orthogonality<\/th>\n<td colspan=\"2\">10 \u03bcm<\/td>\n<td>\u2014<\/td>\n<td>\u2014<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n<section class=\"sl-parameter-panel\">\n<div class=\"sl-parameter-head\">\n<div>\n<p class=\"sl-kicker\">System data<\/p>\n<h3>Operating and integration conditions<\/h3>\n<\/div>\n<\/div>\n<div class=\"sl-table-scroll\" role=\"region\" aria-label=\"SPV5A system specification table\" tabindex=\"0\">\n<table class=\"sl-data-table\">\n<tbody>\n<tr>\n<th>Control options<\/th>\n<td>Open loop \/ encoder closed loop \/ linear-scale closed loop<\/td>\n<\/tr>\n<tr>\n<th>Stacking order<\/th>\n<td>Z \u2192 T \u2192 X \u2192 Y \u2192 R<\/td>\n<\/tr>\n<tr>\n<th>Load capacity<\/th>\n<td>\u22655 kg when R and T are stationary; \u22651 kg in normal five-axis operation<\/td>\n<\/tr>\n<tr>\n<th>Operating temperature<\/th>\n<td>20 \u00b1 10 \u00b0C<\/td>\n<\/tr>\n<tr>\n<th>Vacuum level<\/th>\n<td>&lt; 5.0 \u00d7 10\u207b\u2077 Torr<\/td>\n<\/tr>\n<tr>\n<th>Magnetic shielding<\/th>\n<td>&lt; 0.12 mG at the R-axis surface<\/td>\n<\/tr>\n<tr>\n<th>Centering<\/th>\n<td>Mechanical centering structure<\/td>\n<\/tr>\n<tr>\n<th>Overall dimensions<\/th>\n<td>Defined by the supplied 3D model and application interface<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n<\/div>\n<\/div>\n<\/section>\n<section class=\"sl-fullbleed sl-section sl-showcase\">\n<div class=\"sl-inner sl-showcase-grid\">\n<div>\n<p class=\"sl-kicker\">Integrated motion architecture<\/p>\n<h2 class=\"sl-title\">Built around the sample, chamber and optical path<\/h2>\n<p>The platform combines direct-drive-compatible rotary positioning, a central opening and stacked linear axes in a compact mechanical assembly. AC servo or stepper motors can be selected according to accuracy, speed, feedback and vacuum requirements.<\/p>\n<ul class=\"sl-checks\">\n<li>Direct mechanical connection and repeatable homing<\/li>\n<li>Large central aperture for optical or sample access<\/li>\n<li>Cross-roller-bearing rotary platform for rigid support<\/li>\n<li>Open-loop, encoder or linear-scale feedback options<\/li>\n<\/ul>\n<\/div>\n<div class=\"sl-product-visual\"><img decoding=\"async\" src=\"https:\/\/spotlight-motor.com\/wp-content\/uploads\/2026\/07\/spv5a-vacuum-five-axis-positioning-stage-main-transparent.png\" alt=\"SPV5A vacuum five-axis positioning stage\" loading=\"lazy\" title=\"SPV5A Vacuum Five-Axis Positioning Stage\"><\/div>\n<\/div>\n<\/section>\n<section id=\"sl-applications\" class=\"sl-fullbleed sl-section sl-applications\">\n<div class=\"sl-inner\">\n<p class=\"sl-kicker\">Applications<\/p>\n<h2 class=\"sl-title\">Five-axis sample positioning for scientific instruments<\/h2>\n<p class=\"sl-lead\">The final configuration is selected around the real sample, field of view, chamber space and motion sequence.<\/p>\n<div class=\"sl-application-grid\">\n<article class=\"sl-application-card\">\n<h3>Scanning electron microscopy<\/h3>\n<p>Translate, rotate and tilt samples for inspection while maintaining controlled chamber integration.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Transmission electron microscopy<\/h3>\n<p>Fine multi-axis sample orientation for application-specific microscopy assemblies.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Optical microscopy<\/h3>\n<p>Coordinate linear positioning with angular alignment for imaging and metrology systems.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Confocal and scientific imaging<\/h3>\n<p>Position samples or optics across multiple degrees of freedom in automated instruments.<\/p>\n<\/article>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-integration\" class=\"sl-fullbleed sl-section sl-integration\">\n<div class=\"sl-inner sl-integration-grid\">\n<div>\n<p class=\"sl-kicker\">Integration data<\/p>\n<h2 class=\"sl-title\">Define the chamber and motion envelope before release<\/h2>\n<p class=\"sl-lead\">Share the following information so the stage, motors, feedback, cabling and mechanical interfaces can be checked together.<\/p>\n<\/div>\n<div class=\"sl-data-list\">\n<div class=\"sl-data-row\"><span>Vacuum requirement<\/span><strong>Operating pressure and bake-out conditions<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Payload<\/span><strong>Mass, centre of gravity and inertia<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Motion profile<\/span><strong>Travel, speed, acceleration, duty cycle and settling time<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Accuracy<\/span><strong>Repeatability, orthogonality and feedback requirement<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Optical access<\/span><strong>Required central aperture and beam path<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Interface<\/span><strong>Chamber envelope, mounting pattern, motor and cable exits<\/strong><\/div>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-consultation\" class=\"sl-fullbleed sl-cta\">\n<div class=\"sl-inner sl-cta-inner\">\n<div>\n<h2>Configure the SPV5A for your instrument.<\/h2>\n<p>Send us the chamber pressure, payload, travel, angular range, accuracy and interface requirements for an engineering review.<\/p>\n<\/div>\n<p><a class=\"sl-button\" href=\"https:\/\/spotlight-motor.com\/contact\/\">Contact engineering<\/a><\/div>\n<\/section>\n<section class=\"sl-fullbleed sl-related\">\n<div class=\"sl-inner sl-related-inner\">\n<div>\n<h3>Explore related vacuum positioning solutions<\/h3>\n<p>Linear stages, rotary stages and application-specific multi-axis vacuum assemblies.<\/p>\n<\/div>\n<p><a href=\"https:\/\/spotlight-motor.com\/product-category\/aerospace-grade-special-motors\/vacuum-module\/\">View vacuum modules<\/a><\/div>\n<\/section>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u517c\u5bb9\u771f\u7a7a\u73af\u5883\u7684\u4e94\u8f74\u5b9a\u4f4d\u5e73\u53f0\uff0c\u96c6\u6210 X\/Y\/Z \u76f4\u7ebf\u8fd0\u52a8\u3001R \u8f74\u8fde\u7eed\u65cb\u8f6c\u548c T \u8f74\u503e\u659c\uff0c\u652f\u6301\u591a\u79cd\u53cd\u9988\u65b9\u5f0f\uff0c\u53ef\u5728\u4f4e\u4e8e 5.0 \u00d7 10\u207b\u2077 Torr 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five-axis positioning stage with X\/Y\/Z linear motion, continuous R-axis rotation, T-axis tilt, multiple feedback options and operation below 5.0 \u00d7 10\u207b\u2077 Torr.","_links":{"self":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product\/4944","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/comments?post=4944"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/media\/4945"}],"wp:attachment":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/media?parent=4944"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_brand?post=4944"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_cat?post=4944"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_tag?post=4944"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}