{"id":4924,"date":"2026-07-28T03:53:23","date_gmt":"2026-07-28T03:53:23","guid":{"rendered":"https:\/\/spotlight-motor.com\/?post_type=product&#038;p=4924"},"modified":"2026-07-28T05:16:03","modified_gmt":"2026-07-28T05:16:03","slug":"sphvc65c-vacuum-high-low-temperature-linear-stage","status":"publish","type":"product","link":"https:\/\/spotlight-motor.com\/zh\/product\/sphvc65c-vacuum-high-low-temperature-linear-stage\/","title":{"rendered":"SPHVC65C \u771f\u7a7a\u9ad8\u4f4e\u6e29\u76f4\u7ebf\u5e73\u53f0"},"content":{"rendered":"<style>body.postid-4924 { overflow-x: hidden; } body.postid-4924 [data-id=\"4e2fba0\"], body.postid-4924 [data-id=\"169d9d5\"], body.postid-4924 [data-id=\"4ab745c\"], body.postid-4924 [data-id=\"a65d5ba\"], body.postid-4924 [data-id=\"77d8c47\"], body.postid-4924 [data-id=\"79389ad\"], body.postid-4924 [data-id=\"8d9b055\"], body.postid-4924 [data-id=\"6b8732b\"], body.postid-4924 [data-id=\"bc89a15\"] { display: none !important; } body.postid-4924 [data-id=\"9b05c0a\"], body.postid-4924 [data-id=\"166d5d9\"], body.postid-4924 [data-id=\"166d5d9\"] > .elementor-widget-container { width: 100% !important; 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} .sl-data-table td:first-child { color: #18222c; font-weight: 600; } .sl-data-table--compact { min-width: 0; } @media (max-width: 767px) { .sl-parameter-layout { grid-template-columns: 1fr; gap: 16px; } .sl-parameter-panel--wide { grid-column: auto; } .sl-parameter-head { align-items: flex-start; flex-direction: column; gap: 12px; padding: 24px 20px 20px; } .sl-parameter-head h3 { font-size: 20px; } .sl-data-table { min-width: 620px; font-size: 14px; } .sl-data-table--compact { min-width: 520px; } .sl-data-table th, .sl-data-table td { padding: 14px 16px; } } .sl-product-page a{-webkit-tap-highlight-color:transparent}.sl-product-page a:focus:not(:focus-visible){outline:none}.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 120px)!important;z-index:120}.sl-product-page section[id]{scroll-margin-top:210px}@media(max-width:1024px){.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 86px)!important}.sl-product-page section[id]{scroll-margin-top:176px}}@media(max-width:767px){.sl-detail-nav{top:calc(var(--wp-admin--admin-bar--height, 0px) + 72px)!important}.sl-product-page section[id]{scroll-margin-top:154px}}@media (max-width: 767px) { .sl-product-page .sl-tech-grid { grid-template-columns: minmax(0, 1fr) !important; } .sl-product-page .sl-tech-card { min-width: 0 !important; width: 100% !important; } .sl-product-page .sl-tech-card img { width: 100% !important; max-width: 100% !important; height: auto !important; } .sl-product-page .sl-tech-card .sl-table-scroll { width: 100% !important; min-width: 0 !important; max-width: 100% !important; } }<\/style>\n<div class=\"sl-product-page\">\n<nav class=\"sl-fullbleed sl-detail-nav\" aria-label=\"Product detail navigation\">\n<div class=\"sl-inner sl-detail-nav__inner\"><a href=\"#sl-features\">Product benefits<\/a><a href=\"#sl-technical\">Technical data<\/a><a href=\"#sl-integration\">Integration<\/a><a href=\"#sl-applications\">Applications<\/a><a href=\"#sl-consultation\">Request consultation<\/a><\/div>\n<\/nav>\n<section id=\"sl-features\" class=\"sl-fullbleed sl-section sl-features\">\n<div class=\"sl-inner\">\n<div class=\"sl-kicker\">Vacuum high &#038; low temperature linear stage<\/div>\n<h2 class=\"sl-title\">Precision linear motion for extreme vacuum and temperature environments<\/h2>\n<p class=\"sl-lead\">SPHVC65C combines a rigid linear-stage structure, ball-screw drive and servo motor for positioning tasks in vacuum, cryogenic and elevated-temperature equipment. Final capability depends on the selected materials, lubricant, cable, feedthrough and validation conditions.<\/p>\n<div class=\"sl-feature-grid\">\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Vacuum-oriented construction<\/h3>\n<p>Configuration options are available for chamber pressures down to 1 \u00d7 10<sup>\u22127<\/sup> Pa, subject to final system validation.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Extreme-temperature options<\/h3>\n<p>Application-specific materials and lubrication can support environments from \u2212196 to +200 \u00b0C.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Repeatable positioning<\/h3>\n<p>Specified repeatability is \u00b10.01\u20130.02 mm for properly selected and installed configurations.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Lead-based performance<\/h3>\n<p>Choose the screw lead against travel speed, horizontal load and vertical load requirements.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Scalable travel<\/h3>\n<p>100\u2013600 mm standard, 50 mm increments. Mechanical configurations for 650\u2013800 mm are listed in the supplied drawing; confirm availability and effective travel during selection.<\/p>\n<\/article>\n<article class=\"sl-feature-card\">\n<div class=\"sl-feature-icon\" aria-hidden=\"true\"><\/div>\n<h3>Engineering configuration<\/h3>\n<p>Motor, sensor, cable, connector, brake and mounting details can be reviewed for the target chamber.<\/p>\n<\/article>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-technical\" class=\"sl-fullbleed sl-section sl-tech\">\n<div class=\"sl-inner\">\n<div class=\"sl-kicker\">Engineering information<\/div>\n<h2 class=\"sl-title\">Technical data<\/h2>\n<p class=\"sl-lead\">Technical values are presented as searchable HTML tables. Each table has its own horizontal scroll area on mobile devices.<\/p>\n<div class=\"sl-spec-grid\">\n<div class=\"sl-spec\"><strong>65 mm<\/strong><span>Frame size<\/span><\/div>\n<div class=\"sl-spec\"><strong>\u00b10.01\u20130.02 mm<\/strong><span>Repeatability<\/span><\/div>\n<div class=\"sl-spec\"><strong>1 \u00d7 10<sup>\u22127<\/sup> Pa<\/strong><span>Vacuum level<\/span><\/div>\n<div class=\"sl-spec\"><strong>\u2212196 to +200 \u00b0C<\/strong><span>Temperature range<\/span><\/div>\n<\/div>\n<div class=\"sl-parameter-layout\">\n<section class=\"sl-parameter-panel sl-parameter-panel--wide\">\n<div class=\"sl-parameter-head\">\n<div><span>Motion data<\/span><\/p>\n<h3>Lead, speed and payload options<\/h3>\n<\/div>\n<p>Load values are supplied reference ratings; verify orientation, duty cycle, acceleration, overhang and life requirements.<\/p>\n<\/div>\n<div class=\"sl-table-scroll\" tabindex=\"0\" role=\"region\" aria-label=\"Scrollable SPHVC65C motion specifications\">\n<table class=\"sl-data-table\">\n<caption>SPHVC65C lead and payload configurations<\/caption>\n<thead>\n<tr>\n<th scope=\"col\">Ball-screw lead<\/th>\n<th scope=\"col\">Maximum speed<\/th>\n<th scope=\"col\">Horizontal load<\/th>\n<th scope=\"col\">Vertical load<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>5 mm<\/td>\n<td>250 mm\/s<\/td>\n<td>28 kg<\/td>\n<td>12 kg<\/td>\n<\/tr>\n<tr>\n<td>10 mm<\/td>\n<td>500 mm\/s<\/td>\n<td>16 kg<\/td>\n<td>6 kg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n<section class=\"sl-parameter-panel\">\n<div class=\"sl-parameter-head\">\n<div><span>Drive data<\/span><\/p>\n<h3>Core configuration<\/h3>\n<\/div>\n<\/div>\n<div class=\"sl-table-scroll\" tabindex=\"0\" role=\"region\" aria-label=\"Scrollable SPHVC65C drive data\">\n<table class=\"sl-data-table sl-data-table--compact\">\n<caption>SPHVC65C core drive data<\/caption>\n<tbody>\n<tr>\n<td>Motor power<\/td>\n<td>100 W<\/td>\n<\/tr>\n<tr>\n<td>Ball-screw diameter<\/td>\n<td>\u00d812 mm<\/td>\n<\/tr>\n<tr>\n<td>Repeatability<\/td>\n<td>\u00b10.01\u20130.02 mm<\/td>\n<\/tr>\n<tr>\n<td>Stroke<\/td>\n<td>100\u2013600 mm standard, 50 mm increments<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n<section class=\"sl-parameter-panel\">\n<div class=\"sl-parameter-head\">\n<div><span>Environmental data<\/span><\/p>\n<h3>Configuration limits<\/h3>\n<\/div>\n<\/div>\n<div class=\"sl-table-scroll\" tabindex=\"0\" role=\"region\" aria-label=\"Scrollable SPHVC65C environmental data\">\n<table class=\"sl-data-table sl-data-table--compact\">\n<caption>SPHVC65C environmental configuration references<\/caption>\n<tbody>\n<tr>\n<td>Vacuum level<\/td>\n<td>Down to 1 \u00d7 10<sup>\u22127<\/sup> Pa<\/td>\n<\/tr>\n<tr>\n<td>Temperature range<\/td>\n<td>\u2212196 to +200 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Radiation tolerance<\/td>\n<td>Up to 1 \u00d7 10<sup>6<\/sup> Gy<\/td>\n<\/tr>\n<tr>\n<td>Selection note<\/td>\n<td>Materials, lubricant, cable and verification conditions must be confirmed.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/section>\n<\/div>\n<div class=\"sl-kicker\" style=\"margin-top:56px;\">Mechanical interface<\/div>\n<h2 class=\"sl-title\">Dimensions and stroke configurations<\/h2>\n<p class=\"sl-lead\">The clean mechanical drawing is separated from the searchable dimensional table. Values are in millimetres unless otherwise stated.<\/p>\n<div class=\"sl-tech-grid\">\n<figure class=\"sl-tech-card sl-tech-card--table\"><img decoding=\"async\" src=\"https:\/\/spotlight-motor.com\/wp-content\/uploads\/2026\/07\/sphvc65c-mechanical-dimensions.png\" alt=\"SPHVC65C vacuum linear stage mechanical dimensions\" title=\"SPHVC65C Vacuum High &amp; Low Temperature Linear Stage\" \/><figcaption>SPHVC65C mechanical outline and mounting interface. Confirm the final sensor, cable exit, motor orientation and chamber interface before manufacturing release.<\/figcaption><\/figure>\n<article class=\"sl-tech-card sl-tech-card--table\">\n<div class=\"sl-parameter-head\">\n<div><span>Dimensional reference<\/span><\/p>\n<h3>Stroke-dependent dimensions<\/h3>\n<\/div>\n<p>Mechanical configurations for 650\u2013800 mm are listed in the supplied drawing; confirm availability and effective travel during selection.<\/p>\n<\/div>\n<div class=\"sl-table-scroll\" tabindex=\"0\" role=\"region\" aria-label=\"Scrollable SPHVC65C dimensional table\">\n<table class=\"sl-data-table\" style=\"min-width:900px\">\n<caption>SPHVC65C stroke-dependent mechanical dimensions<\/caption>\n<thead>\n<tr>\n<th scope=\"col\">S (mm)<\/th>\n<th scope=\"col\">L (mm)<\/th>\n<th scope=\"col\">A (mm)<\/th>\n<th scope=\"col\">N<\/th>\n<th scope=\"col\">P<\/th>\n<th scope=\"col\">Weight (kg)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>100<\/td>\n<td>305<\/td>\n<td>208<\/td>\n<td>10<\/td>\n<td>4<\/td>\n<td>2.6<\/td>\n<\/tr>\n<tr>\n<td>150<\/td>\n<td>355<\/td>\n<td>330<\/td>\n<td>12<\/td>\n<td>5<\/td>\n<td>2.9<\/td>\n<\/tr>\n<tr>\n<td>200<\/td>\n<td>405<\/td>\n<td>380<\/td>\n<td>16<\/td>\n<td>7<\/td>\n<td>3.2<\/td>\n<\/tr>\n<tr>\n<td>250<\/td>\n<td>455<\/td>\n<td>430<\/td>\n<td>18<\/td>\n<td>8<\/td>\n<td>3.5<\/td>\n<\/tr>\n<tr>\n<td>300<\/td>\n<td>505<\/td>\n<td>480<\/td>\n<td>20<\/td>\n<td>9<\/td>\n<td>3.8<\/td>\n<\/tr>\n<tr>\n<td>350<\/td>\n<td>555<\/td>\n<td>530<\/td>\n<td>22<\/td>\n<td>10<\/td>\n<td>4.1<\/td>\n<\/tr>\n<tr>\n<td>400<\/td>\n<td>605<\/td>\n<td>580<\/td>\n<td>26<\/td>\n<td>12<\/td>\n<td>4.4<\/td>\n<\/tr>\n<tr>\n<td>450<\/td>\n<td>655<\/td>\n<td>630<\/td>\n<td>28<\/td>\n<td>13<\/td>\n<td>4.7<\/td>\n<\/tr>\n<tr>\n<td>500<\/td>\n<td>705<\/td>\n<td>680<\/td>\n<td>30<\/td>\n<td>14<\/td>\n<td>5<\/td>\n<\/tr>\n<tr>\n<td>550<\/td>\n<td>755<\/td>\n<td>730<\/td>\n<td>32<\/td>\n<td>15<\/td>\n<td>5.3<\/td>\n<\/tr>\n<tr>\n<td>600<\/td>\n<td>855<\/td>\n<td>780<\/td>\n<td>36<\/td>\n<td>17<\/td>\n<td>5.6<\/td>\n<\/tr>\n<tr>\n<td>650<\/td>\n<td>855<\/td>\n<td>830<\/td>\n<td>38<\/td>\n<td>18<\/td>\n<td>5.9<\/td>\n<\/tr>\n<tr>\n<td>700<\/td>\n<td>905<\/td>\n<td>880<\/td>\n<td>40<\/td>\n<td>19<\/td>\n<td>6.2<\/td>\n<\/tr>\n<tr>\n<td>750<\/td>\n<td>955<\/td>\n<td>930<\/td>\n<td>42<\/td>\n<td>20<\/td>\n<td>6.5<\/td>\n<\/tr>\n<tr>\n<td>800<\/td>\n<td>1005<\/td>\n<td>980<\/td>\n<td>47<\/td>\n<td>22<\/td>\n<td>6.8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/article>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-integration\" class=\"sl-fullbleed sl-showcase\">\n<div class=\"sl-inner sl-showcase-grid\">\n<div>\n<div class=\"sl-kicker\">Vacuum-stage integration<\/div>\n<h2 class=\"sl-title\">Configure the stage around the real chamber conditions<\/h2>\n<p>Selection should consider chamber pressure, temperature, radiation exposure, stroke, load direction, speed, acceleration, duty cycle, mounting, sensor, motor cable and feedthrough requirements.<\/p>\n<ul class=\"sl-checks\">\n<li>Confirm horizontal and vertical payload separately<\/li>\n<li>Select the screw lead for the required speed and thrust<\/li>\n<li>Validate lubricant and material compatibility<\/li>\n<li>Review cable routing, sensor and chamber feedthroughs<\/li>\n<\/ul>\n<\/div>\n<div class=\"sl-product-visual\"><img decoding=\"async\" src=\"https:\/\/spotlight-motor.com\/wp-content\/uploads\/2026\/07\/sphvc65c-vacuum-linear-stage-main-transparent.png\" alt=\"SPHVC65C vacuum high and low temperature linear stage with transparent background\" title=\"SPHVC65C Vacuum High &amp; Low Temperature Linear Stage\" \/><\/div>\n<\/div>\n<\/section>\n<section id=\"sl-applications\" class=\"sl-fullbleed sl-section sl-applications\">\n<div class=\"sl-inner\">\n<div class=\"sl-kicker\">Application fields<\/div>\n<h2 class=\"sl-title\">Linear positioning for controlled environments<\/h2>\n<p class=\"sl-lead\">SPHVC65C is intended for engineered motion axes where standard industrial stages cannot meet vacuum or temperature constraints.<\/p>\n<div class=\"sl-application-grid\">\n<article class=\"sl-application-card\">\n<h3>Semiconductor equipment<\/h3>\n<p>Transfer, positioning and process-support axes for vacuum-compatible production tools.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Vacuum coating<\/h3>\n<p>Controlled positioning for deposition, handling and chamber automation systems.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Scientific instruments<\/h3>\n<p>Precision translation for analysis, test and research equipment.<\/p>\n<\/article>\n<article class=\"sl-application-card\">\n<h3>Aerospace simulation<\/h3>\n<p>Application-specific stages for thermal-vacuum and radiation-related test systems.<\/p>\n<\/article>\n<\/div>\n<\/div>\n<\/section>\n<section class=\"sl-fullbleed sl-section sl-integration\">\n<div class=\"sl-inner sl-integration-grid\">\n<div>\n<div class=\"sl-kicker\">System integration<\/div>\n<h2 class=\"sl-title\">Data prepared for engineering review<\/h2>\n<p class=\"sl-lead\">Use the real HTML specification tables and clear mechanical drawing to compare the stage with the complete motion, chamber and feedthrough design.<\/p>\n<\/div>\n<div class=\"sl-data-list\">\n<div class=\"sl-data-row\"><span>Product model<\/span><strong>SPHVC65C<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Frame size<\/span><strong>65 mm<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Motor power<\/span><strong>100 W<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Ball screw<\/span><strong>\u00d812 mm<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Repeatability<\/span><strong>\u00b10.01\u20130.02 mm<\/strong><\/div>\n<div class=\"sl-data-row\"><span>Stroke<\/span><strong>100\u2013600 mm standard, 50 mm increments<\/strong><\/div>\n<\/div>\n<\/div>\n<\/section>\n<section id=\"sl-consultation\" class=\"sl-fullbleed sl-cta\">\n<div class=\"sl-inner sl-cta-inner\">\n<div>\n<h2>Discuss your SPHVC65C vacuum linear axis with our engineers.<\/h2>\n<p>Share the chamber pressure, temperature, radiation level, stroke, load, speed, acceleration, duty cycle and interface requirements for configuration review.<\/p>\n<\/div>\n<p><a class=\"sl-button\" href=\"https:\/\/spotlight-motor.com\/contact\/\">Request consultation&nbsp;&nbsp;\u2192<\/a><\/div>\n<\/section>\n<section class=\"sl-fullbleed sl-related\">\n<div class=\"sl-inner sl-related-inner\">\n<div>\n<h3>Explore related vacuum module solutions<\/h3>\n<p>Compare additional vacuum-compatible stages and modules for your machine design.<\/p>\n<\/div>\n<p><a href=\"https:\/\/spotlight-motor.com\/product-category\/aerospace-grade-special-motors\/vacuum-module\/\">View product category&nbsp;\u2192<\/a><\/div>\n<\/section>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>SPHVC65C vacuum high &#038; low temperature linear stage with a 65 mm frame, \u00b10.01\u20130.02 mm repeatability, 100 W servo drive, \u00d812 mm ball screw, vacuum options down to 1 \u00d7 10\u207b\u2077 Pa and \u2212196 to +200 \u00b0C temperature capability. Final configuration review is required.<\/p>","protected":false},"featured_media":4923,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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vacuum high & low temperature linear stage with a 65 mm frame, \u00b10.01\u20130.02 mm repeatability, 100 W servo drive, \u00d812 mm ball screw, vacuum options down to 1 \u00d7 10\u207b\u2077 Pa and \u2212196 to +200 \u00b0C temperature capability. Final configuration review is required.","_links":{"self":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product\/4924","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/comments?post=4924"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/media\/4923"}],"wp:attachment":[{"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/media?parent=4924"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_brand?post=4924"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_cat?post=4924"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/spotlight-motor.com\/zh\/wp-json\/wp\/v2\/product_tag?post=4924"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}